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Dry Etch TPT Lecture - 4 Etch Characteristics

2.5K views
Jun 26, 2024
30:00

In this video some of the etch characteristics is discussed - that is, the result of the etching on the sample being etched. We look at the etch rate uniformity over the sample with respect to structure sizes and etch loading area. We also look at different etching profiles and discuss etch selectivity between different materials.

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Dry Etch TPT Lecture - 4 Etch Characteristics | NatokHD