This is an instructional video for use of the KLA Tencor Alpha-Step D500 Stylus Profilometer located in the Flexible Cleanroom, part of the Stanford Nano Shared Facilities at Stanford University. Please contact Tom Carver for further information.
See Index below:
0:00 Intro/Description
0:45 Power/Restarting
1:10 Loading Substrate
1:51 Positioning/Video Settings
4:00 Entering Scan Parameter Settings
7:16 Lowering Stylus
7:57 Starting Scan
8:23 Leveling Scan/Averaging Feature
9:32 Reading Step Height
10:14 Removing Substrate
10:37 Additional Info, Tips on Usage
For more information:
http://snsf.stanford.edu/equipment/fab/fcr_profilometer.html
https://nanolabs.stanford.edu/
http://snsf.stanford.edu/