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Lithography tool package training 2 – Coating

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Sep 24, 2024
18:54

The first step in photolithography is to apply a photosensitive coating, known as a resist, to the substrate. Topics in lecture video: • Spin coating principle • Resist composition • Spin coating phases • Spin curve • Soft baking • Cooling • Common coating problems • Edge bead

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Lithography tool package training 2 – Coating | NatokHD