https://www.pvatepla-mps.com/en/products/metrology-systems-vpd/
With VPD (Vapor Phase Decomposition) technology, the surface of the substrate material is broken down in the gaseous phase and the reaction products are discharged. Usually, the contamination previously present in the removed material is not transferred to the gaseous phase and remains on the surface. In the subsequent step, a fluid is dripped over the surface, where it gathers up the remaining impurities. The content of the drops can be analyzed by an ICP-MS or a TXRF, for example.
Advantages:
- Modular design
- The modules can be used individually or in fully automatic combination in
different-sized system housings
- Design as an analysis system with integrated ICP-MS
