Automated Material Handling Systems Solution (Semiconductor)

A material handling solution for cleanroom in 300 mm semiconductor factory, consisting of automated storage and transfer equipment. Delivers 300 mm FOUPs through optimum paths. Storage with N2 purge effective in keeping wafers unoxidized and improving productivity. 300mm半導体向けクリーンルームの物流ソリューション。保管、搬送の自動化設備。300mmFOUPを最適な経路で搬送可能。保管では窒素パージシステムで、ウエハの酸化を防止し生産性向上に貢献。 https://www.daifuku.com/pro/cr/